Ultra-high vacuum applications

Ultra-High Vacuum (UHV) conditions are a prerequisite for most complex research conducted by government labs, academia, and the private industry.

National Laboratories, large global research universities, and industries, such as defense, aerospace or analytical instruments manufacturing, utilize a wide range of vacuum equipment to achieve required levels of vacuum. Many of these organizations rely on Leybold for highly-specific vacuum pumps, instruments, and systems.

UHV is the vacuum regime characterised by pressures lower than about 10⁻⁹ mbar (or 10^-7 Pa). Ultra-high vacuum conditions are necessary to reduce surface contamination in many surface analytic techniques. For example X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS) or field emission microscopy (FEM).

Thin film growth and preparation techniques with stringent requirements for purity, such as molecular beam epitaxy (MBE) and atomic layer deposition (ALD), also rely on UHV conditions.

In research applications like particle accelerators or gravitational wave detectors ultra-high vacuum conditions will mainly help to reduce beam-gas interactions and limit undesired perturbations from the outer environment. These vacuum levels demand the use of special materials and pumping principles.

We offer a broad range of advanced vacuum solutions for use in ambitious UHV applications. Our components, system solutions and after sales services have shown their benefits in major research centers worldwide.

M-UHV Platforms

Modular Ultra-High Vacuum experimentation platforms

Automation based options include

100 | 200 | 300 | 400

Ultimate Pressure

< 5 x 10^-10 mbar

Substrate temperature variation from 100K - 1000K
Accurate temperature measurement
Modular concept along with UHV transfer station facilities easy assembly of cluster systems
Plug and play configuration for a wide range of UHV experimentation tools
Incorporate flag-style sample holders

Related applications
Related products
Advantages

Related applications

High energy physics

Space

Related products

Cryogenic Systems

Turbomolecular vacuum pumps

Ultra high vacuum pumps

ECODRY plus

SCROLLVAC plus

Advantages

Multi-Stage Roots Pumps	Scroll Pumps	Turbomolecular Pumps (TMP)	Cryo Pumps
ECODRY Plus Advantages:	SCROLLVAC plus Advantages:	TURBOVAC IX & MAG W IP TURBOLAB Advantages:	COOLVAC ICL & BL Advantages:
Ideal backing pump for UHV Low ultimate pressure Very quiet <52db(A), low vibrations No contamination with oil or particles Maintenance free for many years	Oil free Quiet 55db(A) 10 min customer tip seal change Very low ultimate pressure	Full range of turbomolecular pumps and systems Hydrocarbon free vacuum generation Low ultimate pressure High pumping speed for light gasses Low maintenance requirements Plug and play pump systems	COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands Clean and dry vacuum generation COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen

Multi-Stage Roots Pumps

Scroll Pumps

Turbomolecular Pumps (TMP)

Cryo Pumps

ECODRY Plus

Advantages:

SCROLLVAC plus

Advantages:

TURBOVAC IX & MAG W IP

TURBOLAB

Advantages:

COOLVAC ICL & BL

Advantages:

Ideal backing pump for UHV
Low ultimate pressure
Very quiet <52db(A), low vibrations
No contamination with oil or particles
Maintenance free for many years

Oil free
Quiet 55db(A)
10 min customer tip seal change
Very low ultimate pressure

Full range of turbomolecular pumps and systems
Hydrocarbon free vacuum generation
Low ultimate pressure
High pumping speed for light gasses
Low maintenance requirements
Plug and play pump systems

COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands
Clean and dry vacuum generation
COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen

Ion Getter Pumps & Controllers	Titanium Sublimation Pumps	NEG Pumps	UHV Hardware, Valves, Fittings
TITan & DIGITEL Advantages:	Advantages:	Advantages:	Advantages:
Hydrocarbon free operation into the XHV range No moving parts, no operating noise Absolutely free of vibrations High tolerance against temperature, radiation and magnetic fields	Ideal pump to remove residual gasses in UHV systems Very high pumping speed for reactive gasses Simple and cost effective	High trapping efficiency for H2 (main residual gas in UHV/ XHV) Vibration free operation Oil free	Broad range of UHV valves, hardware and fittings with CF flanges Low gas resorption materials with lowest leak rates High baking temperatures

Ion Getter Pumps & Controllers

Titanium Sublimation Pumps

NEG Pumps

UHV Hardware, Valves, Fittings

TITan & DIGITEL

Advantages:

Hydrocarbon free operation into the XHV range
No moving parts, no operating noise
Absolutely free of vibrations
High tolerance against temperature, radiation and magnetic fields

Ideal pump to remove residual gasses in UHV systems
Very high pumping speed for reactive gasses
Simple and cost effective

High trapping efficiency for H2 (main residual gas in UHV/ XHV)
Vibration free operation
Oil free

Broad range of UHV valves, hardware and fittings with CF flanges
Low gas resorption materials with lowest leak rates
High baking temperatures

High energy physics

Space

Cryogenic Systems

Turbomolecular vacuum pumps

Ultra high vacuum pumps

ECODRY plus

SCROLLVAC plus

Multi-Stage Roots Pumps	Scroll Pumps	Turbomolecular Pumps (TMP)	Cryo Pumps
ECODRY Plus Advantages:	SCROLLVAC plus Advantages:	TURBOVAC IX & MAG W IP TURBOLAB Advantages:	COOLVAC ICL & BL Advantages:
Ideal backing pump for UHV Low ultimate pressure Very quiet <52db(A), low vibrations No contamination with oil or particles Maintenance free for many years	Oil free Quiet 55db(A) 10 min customer tip seal change Very low ultimate pressure	Full range of turbomolecular pumps and systems Hydrocarbon free vacuum generation Low ultimate pressure High pumping speed for light gasses Low maintenance requirements Plug and play pump systems	COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands Clean and dry vacuum generation COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen

Multi-Stage Roots Pumps

Scroll Pumps

Turbomolecular Pumps (TMP)

Cryo Pumps

ECODRY Plus

Advantages:

SCROLLVAC plus

Advantages:

TURBOVAC IX & MAG W IP

TURBOLAB

Advantages:

COOLVAC ICL & BL

Advantages:

Ideal backing pump for UHV
Low ultimate pressure
Very quiet <52db(A), low vibrations
No contamination with oil or particles
Maintenance free for many years

Oil free
Quiet 55db(A)
10 min customer tip seal change
Very low ultimate pressure

Full range of turbomolecular pumps and systems
Hydrocarbon free vacuum generation
Low ultimate pressure
High pumping speed for light gasses
Low maintenance requirements
Plug and play pump systems

COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands
Clean and dry vacuum generation
COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen

Ion Getter Pumps & Controllers	Titanium Sublimation Pumps	NEG Pumps	UHV Hardware, Valves, Fittings
TITan & DIGITEL Advantages:	Advantages:	Advantages:	Advantages:
Hydrocarbon free operation into the XHV range No moving parts, no operating noise Absolutely free of vibrations High tolerance against temperature, radiation and magnetic fields	Ideal pump to remove residual gasses in UHV systems Very high pumping speed for reactive gasses Simple and cost effective	High trapping efficiency for H2 (main residual gas in UHV/ XHV) Vibration free operation Oil free	Broad range of UHV valves, hardware and fittings with CF flanges Low gas resorption materials with lowest leak rates High baking temperatures

Ion Getter Pumps & Controllers

Titanium Sublimation Pumps

NEG Pumps

UHV Hardware, Valves, Fittings

TITan & DIGITEL

Advantages:

Hydrocarbon free operation into the XHV range
No moving parts, no operating noise
Absolutely free of vibrations
High tolerance against temperature, radiation and magnetic fields

Ideal pump to remove residual gasses in UHV systems
Very high pumping speed for reactive gasses
Simple and cost effective

High trapping efficiency for H2 (main residual gas in UHV/ XHV)
Vibration free operation
Oil free

Broad range of UHV valves, hardware and fittings with CF flanges
Low gas resorption materials with lowest leak rates
High baking temperatures

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Ultra-high vacuum applications

Ultra-High Vacuum (UHV) conditions are a prerequisite for most complex research conducted by government labs, academia, and the private industry.

M-UHV Platforms

Modular Ultra-High Vacuum experimentation platforms

High energy physics

Space

High energy physics

Space

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