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UHV applications - XXL telescope

Ultra-high vacuum applications

Ultra-High Vacuum (UHV) conditions are a prerequisite for most complex research conducted by government labs, academia, and the private industry.

National Laboratories, large global research universities, and industries, such as defense, aerospace or analytical instruments manufacturing, utilize a wide range of vacuum equipment to achieve required levels of vacuum. Many of these organizations rely on Leybold for highly-specific vacuum pumps, instruments, and systems.

UHV is the vacuum regime characterised by pressures lower than about 10−9 mbar (or 10-7 Pa). Ultra-high vacuum conditions are necessary to reduce surface contamination in many surface analytic techniques. For example X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS) or field emission microscopy (FEM).

Thin film growth and preparation techniques with stringent requirements for purity, such as molecular beam epitaxy (MBE) and atomic layer deposition (ALD), also rely on UHV conditions.

In research applications like particle accelerators or gravitational wave detectors ultra-high vacuum conditions will mainly help to reduce beam-gas interactions and limit undesired perturbations from the outer environment. These vacuum levels demand the use of special materials and pumping principles.

We offer a broad range of advanced vacuum solutions for use in ambitious UHV applications. Our components, system solutions and after sales services have shown their benefits in major research centers worldwide.

M-UHV Platforms

Modular Ultra-High Vacuum experimentation platforms

Automation based options include

100 | 200 | 300 | 400

Ultimate Pressure 

< 5 x 10-10 mbar

  • Substrate temperature variation from 100K - 1000K
  • Accurate temperature measurement
  • Modular concept along with UHV transfer station facilities easy assembly of cluster systems
  • Plug and play configuration for a wide range of UHV experimentation tools
  • Incorporate flag-style sample holders
Multi-Stage Roots Pumps Scroll Pumps Turbomolecular Pumps (TMP) Cryo Pumps










  • Ideal backing pump for UHV
  • Low ultimate pressure
  • Very quiet <52db(A), low vibrations
  • No contamination with oil or particles
  • Maintenance free for many years
  • Oil free
  • Quiet 55db(A)
  • 10 min customer tip seal change
  • Very low ultimate pressure
  • Full range of turbomolecular pumps and systems
  • Hydrocarbon free vacuum generation
  • Low ultimate pressure
  • High pumping speed for light gasses
  • Low maintenance requirements
  • Plug and play pump systems
  • COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands
  • Clean and dry vacuum generation
  •  COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen
Ion Getter Pumps & Controllers Titanium Sublimation Pumps NEG Pumps UHV Hardware, Valves, Fittings






  • Hydrocarbon free operation into the XHV range
  • No moving parts, no operating noise
  • Absolutely free of vibrations
  • High tolerance against temperature, radiation and magnetic fields
  • Ideal pump to remove residual gasses in UHV systems
  • Very high pumping speed for reactive gasses
  • Simple and cost effective
  • High trapping efficiency for H2 (main residual gas in UHV/ XHV)
  • Vibration free operation
  • Oil free
  • Broad range of UHV valves, hardware and fittings with CF flanges
  • Low gas resorption materials with lowest leak rates
  • High baking temperatures
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