低溫系統

以最穩固的可靠性，因應您的應用需求

根據所需，取得所有必要品項

COOLPAK i helium compressor
COOLPOWER i cold head/refrigerator
COOLVAC i cryo pump

Either cryogenic systems with cryo pumps, with the refrigerator/cold head or with refrigerator and cryo panel assemblies: each configuration together with our accessories delivers the best cooling performance and reliability for your needs.

Besides cryogenic components and accessories gauges, valves and fore vacuum equipment are mandatory for the cryogenic products in general.

主要應用

低溫冷卻系統 < 10 K	研究與開發	新技術	工業鍍膜與製程
MRI (核磁共振造影) 質子治療超導磁鐵加速器長晶 NMR (核磁共振)	融合能量射電望遠鏡使用法樣品和偵測器冷卻幫浦表面冷卻太空模擬室加速器、光束線與研究腔體的幫浦抽氣	高溫超導裝置氣體清潔氣體液化	用於彈性和平板顯示技術中薄膜鍍膜的幫浦抽氣精密光學電子束焊接硬焊與熱處理爐的抽氣

低溫幫浦系統

幫浦涵蓋的壓力範圍為 10-3 至 ≤ 10-11 mbar。

運作原理為氣態物質透過低溫冷凝、低溫吸附或低溫陷捕的方式，與幫浦內的低溫表面結合。

冷凍幫浦的真空側沒有任何機械式移動、機油或油脂潤滑的零件。

為了產生高真空或超高真空，必須將低溫表面/低溫面板冷卻至一定程度的低溫。其為利用 Leybold 的 COOLPOWER i 系列 (Gifford/McMahon 原理) 製造之經實證可靠性高的一或二元冷凍系統進行冷卻。

Fast and reliable
Great performance
Ease of operation and maintenance

Fast and reliable

The pumping speed for all gases as well as air is highly effective. Even more so for water (H₂O) and hydrogen (H₂).

The cooling performance and cool down can be increased by variable motor speed of the cold head as well as the compressor.

Built with reliable COOLPOWER i cold heads and COOLPAK i compressors.

Cryo pumps are insensitive to mechanical disturbances from particles coming from the process or external vibrations.

Great performance

Low running costs especially at higher pumping speeds

Ease of operation and maintenance

The iSL (iSmartLine) cryo pumps are easy to operate with automatic control and monitoring with our COOL.DRIVE i controller and optional with our CRYOVISION i visualisation tool.