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Glass Coating


Ob Verschleißschutz an mechanischen Bauteilen, Beschichtung von optischen Bauteilen oder Metallisierung von Kunststoffoberflächen – all diese Prozesse finden unter Vakuumbedingungen statt.


Die Vakuumbeschichtung ist eine der effektivsten Methoden, um Oberflächen verschiedener Produkte mit Hochleistungsbeschichtungen zu versehen. Dadurch erhöht sich der Wert für den Kunden. Die Vakuumbeschichtung ist ein High-Tech-Segment des Produktionsmarktes, das sich im steten Wandel befindet und in dem die Lösungen von Leybold maßgebend sind.

Vakuumbeschichtungen werden in einer Vielzahl von Anwendungen eingesetzt:

  1. Beschichtung von niedrigemittierendem Glas zur Reflexion der Sonnenenergie bei 100 % Transparenz. Die so genannte Low-E-Beschichtung ist ein energieeffizientes Produkt, das den Energieverbrauch senkt.
  2. Beschichtung von Architekturglas zur Verbesserung der Ästhetik moderner Hochhäuser durch transparente Lichtfassaden, wobei die Eigenschaften des niedrigemittierenden Glases erhalten bleiben.
  3. Verschleißfeste und harte Beschichtungen zur Optimierung von Schneidwerkzeugen mit hohen Schnittgeschwindigkeiten.
  4. Funktionale Beschichtungen für die Produktion von Solarmodulen, Displays und Touchscreen-Sensoren, um moderne Geräte ständig weiterzuentwickeln und die Qualität zu verbessern.
  5. Spezielle optische Beschichtungen für die Herstellung von optischen Filtern, Linsen, reflektierenden Oberflächen und Antireflexionsflächen.
  6. Dekorative, stark reflektierende Beschichtungen für hochwertige Oberflächen von Teilen und Produkten.

Die Anforderungen am Markt für Vakuumbeschichtungen treiben Leybold konsequent an, optimierte Produkte und kundenspezifische Vakuumlösungen anzubieten: Vorvakuumpumpen, Hochvakuumpumpen, Vakuumsteuerungen, Vakuummessgeräte und Leckerkennungssysteme.

Vakuumpumpen und Lösungen von Leybold bieten

Increased performance of vacuum systems, including increased operational uptimes and decreased downtimes

Predictable and intuitive maintenance using IoT technology

Optimized product design for environmentally-friendly operation

A transparent operating cost structure with efficient energy consumption

Perfect alignment with reliable production operations in 24/7 environments

“Green” thinking and a CO2 reduction concept lays behind the engineering idea for each new product

Produkte für Beschichtungsanwendungen


A modern cost and energy-efficient family of dry screw-type vacuum pumps with unprecedented robustness. DRYVAC can handle repeated shock-venting during load-locking in addition to high dust gas loads during the sputtering process. DRYVAC pumps represent the “next generation” of fore vacuum pumps and are already an industry standard. Their features align well with today’s market requirements, since they're designed for green, environmentally-friendly operation and offer a convenient and transparent service plan.

DRYVAC PowerBoost

Sometimes you need a fully-integrated solution - for example, load locks for inline coaters requiring powerful bursts of energy. DRYVAC PowerBoost is a combination of a DRYVAC and RUVAC booster pump with an intelligent electronic module. This system automatically adapts the RUVAC booster pump’s performance to result in shorter cycle times and lower energy consumption. For clean room environments (TFT, SEMI and FPD), DRYVAC PowerBoost offers the best possible performance at the lowest environmental footprint.


Pumping large volumes requires a high-performing booster pump. Our classic booster pumps RUVAC WA(U) and WS(U) and also our innovative, hermetically tight RUVAC WH(U) can either work with a direct drive or, they can be driven by a frequency converter that allows them to run with higher rotation and pumping speed on a continuous basis.
With a capacity of 250 to 7000 m³/h, we can design vacuum coating systems of all sizes.


The SOGEVAC rotary vane pump family is a time-proven fore-vacuum pump used in coating applications. Since several decades, oil-sealed SOGEVAC pumps are the top choice of customers looking for reliable vacuum pumps with the best reputation for coating applications. You’ll typically find SOGEVAC pumps in systems combined with RUVAC Roots blowers. The SOGEVAC family is available in a wide range of pumping speeds, from 16 m³/h to 750 m³/h, which enables to use this pump family in conjunction with small table-top sputtering systems for large industrial sputtering machines.


TURBOVAC MAGiNTEGRA magnetic-levitated turbo molecular vacuum pumps are production-proven high vacuum pumps that generate a hydrocarbon-free vacuum for challenging applications. Thanks to their robustness, particles generated in the coating process can be tolerated just like high gas flows which appear in some coating applications for industrial production scales. The TURBOVAC MAGiNTEGRA pump is our most suitable solution for high vacuum in sputtering systems. These pumps offer low maintenance costs and high performance when it comes to pumping speed-size-throughput. Do you require a high vacuum pump for larger area coating applications? TURBOVAC MAGiNTEGRA is your go-to solution.


The TURBOVAC i family is a range of mechanical turbo molecular vacuum pumps offers various models optimized for industrial applications. Thanks to their special design, our robust TURBOVAC i IND version is best suited for tolerating particles generated in the coating process or the high gas flows needed in certain coating applications from small to mid-sized vacuum chambers.


High-vacuum diffusion pumps are versatile enough for many applications, but they’re particularly useful for decorative coatings, wear protection treatments and roll-to-roll coatings. Our robust and cost-effective diffusion pumps of the DIP and DIJ range offer the lowest price-for-pumping speeds for any application requiring high vacuum.


High vacuum pump family for get humidity and oil free vacuum with lowest ultimate pressure down to 10-9 mbar. Optic layers need to be pure as much as possible to get right properties – so if purity of vacuum system is play core role then COOLVAC is right choice.


Stable vacuum pressure is essential for consistently high-quality coatings. Depending on the process, the vacuum level and the accuracy required, various gauges are used to monitor or even control the vacuum level. From TTR91 or TTR101 gauges for rough vacuum to ITR90 for high vacuum levels, we offer a full line of gauges to meet your processing needs. For vacuum coating processes it is important to achieve an exact pressure during sputtering and a low ultimate pressure. In certain high-precision sputtering processes, the accuracy of measuring pressure plays a vital role. We have developed our own family of vacuum gauges that offer a measurement and control system for all sizes and all accuracy levels.


A tight vacuum system is a prerequisite for a stable coating process, ensuring a uniform product quality. Therefore, coating systems are leak tested with our PHOENIX rang of helium leak detectors. The range includes both wet and dry solutions and mobile and cart-mounted systems.

Vakuumanschlüsse und -ventile

A vacuum system isn’t complete without special vacuum-tights parts, fittings and valves. All our accessories, from valves, sealing, piping and hoses fit perfectly with our pumps and comply with all world standards, such as ISO-K and ISO-CF.

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