Milestones
Our history spans a period of over 170 years. Innovative vacuum technology was continually put to use in order to make the applications of our customers possible and enable profitable progress.
1850 – The beginning of Leybold
Businessman Ernst Leybold laid the foundation when he moved from Rothenburg ob der Tauber to Cologne in 1850 and founded his first company, which began as a sales and import business for medical glassware, ointment pots, thermometers and scales. In 1854, Leybold expanded his line of products to include physical, pharmaceutical and chemical equipment. In 1863, he finally took over the company under the name E. Leybold.
1870 - Sale to Emil Schmidt and Otto Ladendorff
In 1870, Ernst Leybold sold his business, which, however, continued to operate as E. Leybold’s Nachfolger.
In 1871, the product line included as many as 585 pieces of physics equipment, as well as “Physics Cabinets” (complete collections of equipment and instruments) which were offered for the first time. Our company’s history proudly records an order received from Quito University, Ecuador, worth 30,000 Thalers (approx. 250,000.- dollars by Today’s standards). This established us as a company of international reputation. In 1876, the first catalogue of physics equipment was published for use in secondary and high schools. This product line was gradually expanded to include chemical apparatuses for laboratories. A special brochure on Crookes’ experiments followed four years later, from which we quote the following, “There is no doubt that the new and often exciting developments in high vacuum will incite further experiments”. To demonstrate such experiments, the Toepler Pump, an early positive displacement vacuum pump which was manually operated by alternately raising and lowering a mercury column, was included in the catalogue.
1906 - Innovations of undiminished importance
Our triumphal procession of vacuum technology began in 1906 through collaboration with Dr. Wolfgang Gaede, Professor of Physics in Karlsruhe. Leybold’s cooperation with Gaede was correspondingly fruitful. It produced important innovations that are still relevant today: the invention of the molecular air pump, the basic principle of the turbomolecular pump (1911) and the use of the diffusion pump (1913). Diffusion pumps have no moving parts.
1913 - The beginning of vacuum metallurgy
Dr. Wilhelm Rohn, head of the Physical Test Laboratory at W.C. Heraeus GmbH in Hanau, developed a process for melting highpurity metals under vacuum. This enabled considerable quality improvements to steels and nonferrous metals.
1931 - Wilheim C. Heraeus succeeded in vaporizing metals onto glass
This was another milestone in vacuum coating technology. In the same year, E. Leybold’s Nachfolger, Dr. Manfred Dunkel, took over as our managing director and successfully led the company until 1967. This era was significant, as vacuum technology was increasingly used in industrial applications during this time. Accordingly, in addition to technical and scientific knowledge, significant management skills were also required in order to transfer the findings to process engineering applications.
1934 - On December 13, Gaede received the Siemens Ring
The Siemens Ring Foundation was established by industry and scientific representatives in Germany in 1916 to commemorate Werner von Siemens’ 100th birthday. In accordance with §1 of its statutes, the foundation pursued the goal of honoring individuals “who have rendered outstanding and generally recognized services to technology in conjunction with science. ... [ The Siemens Ring ] should therefore be awarded to representatives of technology who have stimulated science through their achievements as well as to representatives of science who have opened up new areas of technology through their research.”
1957 - These 10 years are characterized by the expansion and extension of our product portfolio
Our most significant new designs center around “roots pumps” (today, referred to as “roots blowers”), “which meet the requirements of large-scale industry”. The catalogue reads: “Modern vacuum process engineering requires high flow rates in the fine vacuum range for a significant part of its processes. In fine vacuum processes, for example, large quantities of gas and water vapor are produced at pressures below 1 torr. Vacuum technology is therefore faced with the task of economically/efficiently pumping off these quantities of gas.” Major effort was dedicated to the fields of vacuum impregnation, chemical processing, pharmaceuticals and the freeze-drying of foods as well as high and ultra-high vacuum coating plants, metal degassing, etc. At the same time, we continued on a large scale the development of standard vacuum components, such as pumps, valves and gauges for all vacuum pressure lines, leak detectors and the steady expansion of its line of scientific and technological teaching tools.
1967 - The merger of E. Leybold’s Nachfolger with Heraeus Hochvakuum GmbH was confirmed
The new company was named Leybold-Heraeus GmbH, and its shares were equally divided among Degussa, Metallgesellschaft and W.C. Heraeus
1975 - Our magnetically-levitated turbomolecular pump was introduced
In the mid-1970s, a new era of high vacuum technology officially began and was referred to as “the era of the magnetically-levitated turbomolecular pump”. We were the first vacuum company in the world to make such a pump commercially available. In the 1980s and 1990s, the magnetically-levitated turbo molecular pump became the most important high vacuum pump in the semiconductor industry, due to it being a hydrocarbon-free high vacuum pump. Electromagnets are used in the “bearing” of the rapidly-rotating inner parts.
1983 - The TRIVAC B oil-sealed rotary vane vacuum pump with integrated oil pump made its debut, and achieved great success
This type of pump is, in fact, still widely used in many vacuum applications today. For customers who are able to accept oil molecules in their vacuum tanks, the rotary vane vacuum pump makes for an extraordinarily powerful and reliable pump for both rough and fine vacuum.
1989 - Our first turbomolecular pump with intelligent drive management was introduced
Our first turbomolecular pump with intelligent drive management was introduced.
1996 - Leybold establishes a subsidiary in Tianjin, China – Oerlikon. Our first Chinese location
We founded a wholly-owned subsidiary in China in order to leverage the high potential of this emerging economic region and customer proximity from 1998 onwards.
2001 - Our SCREWLINE dry compressing vacuum pump is introduced
Our SCREWLINE dry compressing vacuum pump is introduced.
2004 - Our opening of the new Cologne production facility
Our opening of the new Cologne production facility for high vacuum technology allowed Leybold to meet increased requirements in research and development work.
2006 - Cryo pump production begins in Dresden, Germany
Supported by economic growth, the UNAXIS Group was renamed Oerlikon. We operated under the name Oerlikon Leybold Vacuum.
2007 - SCREWLINE dry screw pump for robust applications is launched
With today’s demanding research and industrial applications, dry compressing screw pumps like the SCREWLINE are the preferred backing pumps. Compared to oil-sealed pumps, they’re more powerful and reliable, and their design allows for their use wherever reliable, compact and low-maintenance vacuum solutions are required. A major advantage is that they add a high degree of flexibility to various fields of application. In addition, they can be cleaned onsite by the customer during production breaks. Various connections also allow for easy integration into all systems.
2009 - Expansion of the roots pump product line
We launched the RUVAC WH roots vacuum pump, which adds a high degree of flexibility to various fields of application. In addition, it can be cleaned onsite by the customer during production breaks. Various connections also allow for easy integration into all systems.
2010 - Our new dry compressing vacuum pump, the DRYVAC, celebrates its debut
This pump is also based on dry screw technology and combines a compact design with features, including quiet operation, low-waste heat and low-cooling water consumption. An integrated frequency converter reduces installation effort.
2011 - We launched the MAGiNTEGRA, a flexible high vacuum pump, for the solar and coating markets
Our TURBOVAC MAGiNTEGRA magnetically-levitated turbo molecular pumps don’t require the space that’s usually necessary for a separate frequency converter and provide a compact, flexible design, excellent vacuum performance and a standardized line of accessories. It offers maintenance-free operation in most industrial processes, such as display, solar, coating and R&D applications.
2014 - Inauguration of our new logistics hub in Cologne, Germany. This year marked a great leap in vacuum technology with the launch of the TURBOVAC i
Modern analytical instrumentation requires highly-developed components. In mass spectrometers particularly, these components need to be precisely matched to each other. Thanks to new turbomolecular pumps, analysis throughput is increased significantly. We have confronted these performance challenges and have designed their innovative line of turbomolecular pumps. TURBOVAC i pumps: tailor made for the analytical instrumentation market.
2015 - We shift the service activities to Dresden, forming the EU center for service competencies
We shift the service activities to Dresden, forming the EU center for service competencies.
2016 - We are acquired by Atlas Copco
The Swedish company, Atlas Copco AB, acquired 100 percent of Leybold. Atlas Copco is a multi-brand group with customers in more than 180 countries and approximately 40,000 employees. We are now part of Atlas Copco’s Vacuum Technique Business Area. Atlas Copco relies on our traditional brand strength and complements the innovative technological expertise and market presence of the Swedes.
2017 - PHOENIX 4
After 15 years, we launched the PHOENIX 4, a new family of helium leak detectors which meet increasing quality requirements. This innovative product is equally suited to the demands of research and development as for industrial applications - from securing the ultra-high vacuum demands of CERN’s particle accelerator to industrial applications, such as leak detection in the Hyperloop vacuum transport system, or for the production of semiconductors.
2017 - SCROLLVAC plus
Users in research and industry increasingly rely on dry and robust vacuum solutions, which also provide flexibility of use. With the modernized, air-cooled SCROLLVAC plus, we offer a simple, new and reliable fore vacuum pump which meets these requirements.
2018 - SOGEVAC Neo D
The new generation of SOGEVAC vacuum pumps: triple-hitting vacuum technology for cleaner, quieter, longer-running performance.
2018 - VARODRY
We designed and produced the new VARODRY vacuum pump series in Germany, specifically for industrial processes. Give yourself one less headache. With VARODRY, vacuum can be easy, efficient, reliable and dry.
2019 - NOVADRY
Until today, oil-sealed rotary vane pumps were the norm in the food processing industry. However, using such pumps bears risks, as the pump oil can end up polluting your workspace or, even worse, your food. To avoid these risks and to ensure product freshness, we have developed the “NOVADRY”. This 100% oil-free vacuum pump revolutionizes the market.
2020 - ECODRY plus
Dry, multi-stage technology receives further development with the new ECODRY plus generation which combines the advantages of a smaller size, smart operation, fast pump down times and environmental friendliness. These new dry compressing pumps are particularly well-suited for the operation in analytical applications.
2020 - TURBOVAC i
The development of larger hybrid turbomolecular vacuum pumps, with pumping speeds above 900 l/s, is one of the achievements which highlights our ever-lasting pioneering spirit.
1850 – 1863: The beginning of Leybold
Businessman Ernst Leybold laid the foundation when he moved from Rothenburg ob der Tauber to Cologne in 1850 and founded his first company, which began as a sales and import business for medical glassware, ointment pots, thermometers and scales. In 1854, Leybold expanded his line of products to include physical, pharmaceutical and chemical equipment. In 1863, he finally took over the company under the name E. Leybold.
1870 – 1876: Sale to Emil Schmidt and Otto Ladendorff
In 1870, Ernst Leybold sold his business, which, however, continued to operate as E. Leybold’s Nachfolger.
In 1871, the product line included as many as 585 pieces of physics equipment, as well as “Physics Cabinets” (complete collections of equipment and instruments) which were offered for the first time. Our company’s history proudly records an order received from Quito University, Ecuador, worth 30,000 Thalers (approx. 250,000.- dollars by Today’s standards). This established us as a company of international reputation. In 1876, the first catalogue of physics equipment was published for use in secondary and high schools. This product line was gradually expanded to include chemical apparatuses for laboratories. A special brochure on Crookes’ experiments followed four years later, from which we quote the following, “There is no doubt that the new and often exciting developments in high vacuum will incite further experiments”. To demonstrate such experiments, the Toepler Pump, an early positive displacement vacuum pump which was manually operated by alternately raising and lowering a mercury column, was included in the catalogue.
1906: Innovations of undiminished importance
Our triumphal procession of vacuum technology began in 1906 through collaboration with Dr. Wolfgang Gaede, Professor of Physics in Karlsruhe. Leybold’s cooperation with Gaede was correspondingly fruitful. It produced important innovations that are still relevant today: the invention of the molecular air pump, the basic principle of the turbomolecular pump (1911) and the use of the diffusion pump (1913). Diffusion pumps have no moving parts.
1913: The beginning of vacuum metallurgy
Dr. Wilhelm Rohn, head of the Physical Test Laboratory at W.C. Heraeus GmbH in Hanau, developed a process for melting highpurity metals under vacuum. This enabled considerable quality improvements to steels and nonferrous metals.
1931: Wilheim C. Heraeus succeeded in vaporizing metals onto glass
This was another milestone in vacuum coating technology. In the same year, E. Leybold’s Nachfolger, Dr. Manfred Dunkel, took over as our managing director and successfully led the company until 1967. This era was significant, as vacuum technology was increasingly used in industrial applications during this time. Accordingly, in addition to technical and scientific knowledge, significant management skills were also required in order to transfer the findings to process engineering applications.
1934: On December 13, Gaede received the Siemens Ring
The Siemens Ring Foundation was established by industry and scientific representatives in Germany in 1916 to commemorate Werner von Siemens’ 100th birthday. In accordance with §1 of its statutes, the foundation pursued the goal of honoring individuals “who have rendered outstanding and generally recognized services to technology in conjunction with science. ... [ The Siemens Ring ] should therefore be awarded to representatives of technology who have stimulated science through their achievements as well as to representatives of science who have opened up new areas of technology through their research.”
1957 – 1967: These 10 years are characterized by the expansion and extension of our product portfolio.
Our most significant new designs center around “roots pumps” (today, referred to as “roots blowers”), “which meet the requirements of large-scale industry”. The catalogue reads: “Modern vacuum process engineering requires high flow rates in the fine vacuum range for a significant part of its processes. In fine vacuum processes, for example, large quantities of gas and water vapor are produced at pressures below 1 torr. Vacuum technology is therefore faced with the task of economically/efficiently pumping off these quantities of gas.” Major effort was dedicated to the fields of vacuum impregnation, chemical processing, pharmaceuticals and the freeze-drying of foods as well as high and ultra-high vacuum coating plants, metal degassing, etc. At the same time, we continued on a large scale the development of standard vacuum components, such as pumps, valves and gauges for all vacuum pressure lines, leak detectors and the steady expansion of its line of scientific and technological teaching tools.
1967: The merger of E. Leybold’s Nachfolger with Heraeus Hochvakuum GmbH was confirmed.
The new company was named Leybold-Heraeus GmbH, and its shares were equally divided among Degussa, Metallgesellschaft and W.C. Heraeus
1975: Our magnetically-levitated turbomolecular pump was introduced.
In the mid-1970s, a new era of high vacuum technology officially began and was referred to as “the era of the magnetically-levitated turbomolecular pump”. We were the first vacuum company in the world to make such a pump commercially available. In the 1980s and 1990s, the magnetically-levitated turbo molecular pump became the most important high vacuum pump in the semiconductor industry, due to it being a hydrocarbon-free high vacuum pump. Electromagnets are used in the “bearing” of the rapidly-rotating inner parts.
1983: The TRIVAC B oil-sealed rotary vane vacuum pump with integrated oil pump made its debut, and achieved great success.
This type of pump is, in fact, still widely used in many vacuum applications today. For customers who are able to accept oil molecules in their vacuum tanks, the rotary vane vacuum pump makes for an extraordinarily powerful and reliable pump for both rough and fine vacuum.
1989: Our first turbomolecular pump with intelligent drive management was introduced.
Our first turbomolecular pump with intelligent drive management was introduced.
1996: Leybold establishes a subsidiary in Tianjin, China – Oerlikon. Our first Chinese location.
We founded a wholly-owned subsidiary in China in order to leverage the high potential of this emerging economic region and customer proximity from 1998 onwards.
2001: Our SCREWLINE dry compressing vacuum pump is introduced.
Our SCREWLINE dry compressing vacuum pump is introduced.
2004: Our opening of the new Cologne production facility
Our opening of the new Cologne production facility for high vacuum technology allowed Leybold to meet increased requirements in research and development work
2006: Cryo pump production begins in Dresden, Germany.
Supported by economic growth, the UNAXIS Group was renamed Oerlikon. We operated under the name Oerlikon Leybold Vacuum.
2007: SCREWLINE dry screw pump for robust applications is launched.
With today’s demanding research and industrial applications, dry compressing screw pumps like the SCREWLINE are the preferred backing pumps. Compared to oil-sealed pumps, they’re more powerful and reliable, and their design allows for their use wherever reliable, compact and low-maintenance vacuum solutions are required. A major advantage is that they add a high degree of flexibility to various fields of application. In addition, they can be cleaned onsite by the customer during production breaks. Various connections also allow for easy integration into all systems.
2009: Expansion of the roots pump product line.
We launched the RUVAC WH roots vacuum pump, which adds a high degree of flexibility to various fields of application. In addition, it can be cleaned onsite by the customer during production breaks. Various connections also allow for easy integration into all systems.
2010: Our new dry compressing vacuum pump, the DRYVAC, celebrates its debut.
This pump is also based on dry screw technology and combines a compact design with features, including quiet operation, low-waste heat and low-cooling water consumption. An integrated frequency converter reduces installation effort.
2011: We launched the MAGiNTEGRA, a flexible high vacuum pump, for the solar and coating markets.
Our TURBOVAC MAGiNTEGRA magnetically-levitated turbo molecular pumps don’t require the space that’s usually necessary for a separate frequency converter and provide a compact, flexible design, excellent vacuum performance and a standardized line of accessories. It offers maintenance-free operation in most industrial processes, such as display, solar, coating and R&D applications.
2014: Inauguration of our new logistics hub in Cologne, Germany. This year marked a great leap in vacuum technology with the launch of the TURBOVAC i.
Modern analytical instrumentation requires highly-developed components. In mass spectrometers particularly, these components need to be precisely matched to each other. Thanks to new turbomolecular pumps, analysis throughput is increased significantly. We have confronted these performance challenges and have designed their innovative line of turbomolecular pumps. TURBOVAC i pumps: tailor made for the analytical instrumentation market.
2015: We shift the service activities to Dresden, forming the EU center for service competencies.
We shift the service activities to Dresden, forming the EU center for service competencies.
2016: We are acquired by Atlas Copco.
The Swedish company, Atlas Copco AB, acquired 100 percent of Leybold. Atlas Copco is a multi-brand group with customers in more than 180 countries and approximately 40,000 employees. We are now part of Atlas Copco’s Vacuum Technique Business Area. Atlas Copco relies on our traditional brand strength and complements the innovative technological expertise and market presence of the Swedes.
2017: PHOENIX 4
After 15 years, we launched the PHOENIX 4, a new family of helium leak detectors which meet increasing quality requirements. This innovative product is equally suited to the demands of research and development as for industrial applications - from securing the ultra-high vacuum demands of CERN’s particle accelerator to industrial applications, such as leak detection in the Hyperloop vacuum transport system, or for the production of semiconductors.
2017: SCROLLVAC plus
Users in research and industry increasingly rely on dry and robust vacuum solutions, which also provide flexibility of use. With the modernized, air-cooled SCROLLVAC plus, we offer a simple, new and reliable fore vacuum pump which meets these requirements.
2018: SOGEVAC Neo D
The new generation of SOGEVAC vacuum pumps: triple-hitting vacuum technology for cleaner, quieter, longer-running performance.
2018: VARODRY
We designed and produced the new VARODRY vacuum pump series in Germany, specifically for industrial processes. Give yourself one less headache. With VARODRY, vacuum can be easy, efficient, reliable and dry.
2019: NOVADRY
Until today, oil-sealed rotary vane pumps were the norm in the food processing industry. However, using such pumps bears risks, as the pump oil can end up polluting your workspace or, even worse, your food. To avoid these risks and to ensure product freshness, we have developed the “NOVADRY”. This 100% oil-free vacuum pump revolutionizes the market.
2020: ECODRY plus
Dry, multi-stage technology receives further development with the new ECODRY plus generation which combines the advantages of a smaller size, smart operation, fast pump down times and environmental friendliness. These new dry compressing pumps are particularly well-suited for the operation in analytical applications.
2020: TURBOVAC i
The development of larger hybrid turbomolecular vacuum pumps, with pumping speeds above 900 l/s, is one of the achievements which highlights our ever-lasting pioneering spirit.
