- For applications which require a high pumping speed at pressures between 10-2 and 10-4 mbar (0.75 x 10-2 and 0.75 x 10-4 Torr)
- Used where the possibility of contamination due to air ingress or pumped media leakage must be avoided
- Suction or pumping of high-purity gases
- Is used in clean rooms were the air must not be recirculated by the motor‘s fan
RUVAC roots blower is a standard equipment in the architectural glass coating industry. Combined with established oil sealed SOGEVAC pumps they realize the shortest pump down time at the loadlock chambers. Combined with the dry compressing DRYVAC and SCREWLINE pumps they guarantee a dry, reliable and trouble-free vacuum at the process chambers.
RUVAC roots blower is used in many applications to achieve the shortest possible cycle times, wherever fast evacuations are important, for example, in supporting load lock chambers or in high-speed food packaging.
RUVAC roots blower quickly reaches a pressure of less than 10-3 mbar when evacuating lamps and insulating surfaces prior to the vapor deposition processes.
RUVAC blower is also used in monocrystal pulling equipment for the manufacture of silicon mono-crystal, the basic material for the manufacture of semiconductors and solar cells. We would be pleased to offer you our extensive product and applications support and know-how.