Oil diffusion/Oil Vapor Jet Pumps
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Leybold DIJ series of oil diffusion pumps are high vacuum pumps (<10-2 mbar) featuring an advanced design with innovative heater system, special body construction, and a five-stage nozzle system for faster pump down of the process chamber, reduced energy consumption and a lower carbon footprint.
The DIJ series provide an improved gas throughput and stable high vacuum pressure in the range of < 10-2 mbar. The pumping speed ranges from 3,000 l/s to 33,000 l/s in an operating range of < 5 x 10-1 to 10-7 mbar.
The DIJ features an advanced new heating concept, a powerful five-stage nozzle system, variable flange connections, a multitude of electrical connection options including the Energy Efficiency Controller (EEC), fully equipped with fore-line baffles and cold cap baffles. The DIJ five-stage system design provides excellent performance. Four diffusion pump stages for the high pumping speed and one ejector stage for high gas throughput at pressures of <10-2 mbar and a high fore-vacuum stability. The variants with EEC offer added energy efficiency resulting in further energy savings and a lower carbon footprint.
Leybold DIJ oil diffusion pumps require little maintenance - no wear caused by revolving parts - easy to operate. The DIJ series is impressive with its innovative and highly energy-efficient construction.
Five-stage nozzle system
Cold cap baffle and fore vacuum baffle
Innovative heating concept
Different flanges (ANSI/ISO)
Various electrical connection opportunities to meet customers requirements
Energy Efficiency Control
Pumping speed 3.000 to 33.000 l/s
Operating range < 10-1 to 10-7 mbar
Optimal pumping speed in a pressure range of < 10-3 mbar
The DIJ line offers
The DIJ line offers a wide range of beneficial features for an optimal integration in your applications.
Unique, innovative heating concept that utilizes advanced heater cartridges with large heat exchange surface for an optimized energy transfer into the oil. Effective temperature monitoring protects the system against overheating. The insulated heater area ensures minimum energy losses.
The DIJ pumps are equipped with a new five-stage nozzle system. Four pump stages guarantee high pumping speed at low pressures and lead to a low range of high vacuum. The ejector stage leads to a high fore-vacuum stability and optimized gas-throughput.
Choice of flange variants for improved connectivity
To prevent fluid from flowing back into the vacuum chamber, the DIJ series pumps are fitted with our process-proven cold cap baffle and an optimized fore-vacuum baffle.
Energy savings up to 30% without loss of pump performance
Oil diffusion pumps require a certain minimum oil temperature for operation. Without a controller, 100% of the installed heating power is constantly utilized to heat the oil. Leybold’s innovative energy efficiency controller for diffusion pumps cuts power consumption by up to 30% as the supplied power is significantly reduced after the pump has attained its operating temperature. Further savings result from the utilization of the standby mode at a reduced temperature.
|DIJ 10||DIJ 320||DIJ 16||DIJ 500||DIJ 20||DIJ 630||DIJ 32||DIJ 800||DIJ 35||DIJ 1000|
|High vacuum||10'' ANSI||320 ISO-K||16'' ANSI||500 ISO-K||20'' ANSI||630 ISO-K||32'' ANSI||800 ISO-F||35'' ANSI||1000 ISO-F|
|fore vacuum connection||2'' ANSI||63 ISO-K||3'' ANSI||100 ISO-K||4'' ANSI||160 ISO-K||6'' ANSI||200 ISO-K||6'' ANSI||200 ISO-K|
|Pumping speed for|
Air < 8 x 10-4mbar
Argon < 1 x 10-4 mbar
|Operating range||mbar||< 10-1 - 10-7||< 10-1 - 10-7||< 10-1 - 10-7||< 10-1 - 10-6||< 10-1 - 10-6|
|Ultimate total pressure||mbar||< 5 · 10-7||< 5 · 10-7||< 5 · 10-7||< 1 · 10-6||< 1 · 10-6|
|Mains voltage||3 ~ 400V /N/PE||3 ~ 400V /N/PE||3 ~ 400V /N/PE||3 ~ 400V /N/PE||3 ~ 400V /N/PE|
|depending on variant, 50/60Hz||3 ~ 460V /N/PE||3 ~ 460V /N/PE||3 ~ 460V /N/PE||3 ~ 460V /N/PE||3 ~ 460V /N/PE|
Oil diffusion pumps from DIJ series are well-suited for operation in industrial applications: