UNIVEX C
Cluster & Custom Deposition Systems
For special applications we can also supply cluster or custom systems based on the UNIVEX modular concept.
- UNIVEX C - CLUSTER
- UNIVEX C - CUSTOM
UNIVEX C - CLUSTER
UNIVEX C - CLUSTER
Our UNIVEX clusters are equipped according to customer requirements and incorporate separate processing, load lock and transfer chambers. Generally, each vacuum chamber will have its own high vacuum system. The load lock chamber is in the simplest case loaded manually with individual substrates. In addition, magazine processing of several substrates per batch is possible.
For transporting the substrates between the individual vacuum chambers, commonly motor driven robot arms or linear transfer drive units are used. The UNIVEX control software is customised according to the specific application requirements, and will generally allow fully automatic running of the process including recipe processing.
UNIVEX C - CUSTOM
UNIVEX C - CUSTOM
In case no UNIVEX type of system fits to your requirements, any different chamber size or height is desired? Never mind, just contact us.
We are looking forward to making your system possible!
UNIVEX C - CLUSTER
Our UNIVEX clusters are equipped according to customer requirements and incorporate separate processing, load lock and transfer chambers. Generally, each vacuum chamber will have its own high vacuum system. The load lock chamber is in the simplest case loaded manually with individual substrates. In addition, magazine processing of several substrates per batch is possible.
For transporting the substrates between the individual vacuum chambers, commonly motor driven robot arms or linear transfer drive units are used. The UNIVEX control software is customised according to the specific application requirements, and will generally allow fully automatic running of the process including recipe processing.
UNIVEX C - CUSTOM
In case no UNIVEX type of system fits to your requirements, any different chamber size or height is desired? Never mind, just contact us.
We are looking forward to making your system possible!
