Thin Films

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. The thin film technology has been improved in the last decades and requires reliable products to reach best quality. For the thin film deposition processes, Leybold can provide best in class vacuum equipment fullfilling the requirements of this application with its performant dry DRYVAC / RUVAC pumping systems.

Pump systems with dry compressing pumps

  • High hydrogen pumping speed
  • Particle resistant
  • High media compatibility for typical process gases
  • Integrated monitoring of operating parameters and roots pump control
  • Adjustable temperature and purge gas flow
  • Parameter controllable via Profi bus