Dry compressing vacuum pumps in combination with roots blowers

  • High pumping speed
  • High reliability
  • Suitable for demanding process applications (dust, vapors, etc.)
  • Monitoring system

Turbomolecular pumps

  • Suited for handling particles
  • High forevacuum tolerance
  • Installation in any orientation

Single-stage rotary vane pumps in combination with roots blowers

  • Designed for fast pump down of
  • Load Lock and Transfer Chambers
  • Robust vacuum generator for the rough vacuum range
  • High reliability
  • Cost optimized