Based on the longstanding experience in the design and manufacture of vacuum pump systems, Leybold offers standardized pump systems which will match most applications – the TRIVAC pump systems. TRIVAC pump systems excel by being compact, reliable and service-friendly.
The two to three stage oil sealed TRIVAC pump systems are equipped with TRIVAC as fore vacuum pump combined with RUVAC WA(U), WS(U). In single-flow arrangements suction speeds of 250 to 501 are possible. Higher suction speeds can be achieved by adding pumps systems in parallel. The achievable working pressure depends on the number of pump stages and of pump systems in parallel.
The pump systems are equipped as standard with 400 V, 50 Hz und 460V, 60Hz three phase motors. Motors for special supply voltages, special mains frequencies or explosion protected pumps are available.
TRIVAC systems are also used as backing pump sets for high vacuum systems in combination with diffusion pumps, turbomolecular pumps and cryopumps. Leybold pump systems are rated according to CE, ISO, DIN and VDE regulations.
Three-stage, with two-stage TRIVAC backing pumps
Standard equipment
Options
Three-stage, with two-stage TRIVAC backing pumps
Standard Equipment
Options