UNIVEX G glove box
Loading and coating of moisture and oxygen sensitive substrates under an inert environment
Our standard glovebox system enables loading and coating of moisture and oxygen sensitive substrates under the inert environment of a glovebox.
The UNIVEX G systems have a front sliding door for connection to the glovebox. This sliding door allows the operator an easy access to the process chamber via the glovebox. In case direct access is required, the UNIVEX G have a second door at the rear.
Common applications
- Contact metallization (evaporation of gold, silver, chromium, nickel, titanium, etc.)
- Biosensors / medical devices
- Organic electronics: OLED, organic photovoltaics
- Quantum dots / display
- E-beam and organics evaporators for inorganic-organic perovskite formation
- UNIVEX G 250
- UNIVEX G 350
- UNIVEX G 450
UNIVEX G 250
UNIVEX G 250
The UNIVEX G 250 is a convenient and cost-effective solution for coating tasks requiring not much space.
Substrates, respectively substrate holders up to an overall diameter of approximately 220 mm can be processed.
G 250 |
|
|---|---|
Chamber size |
Width 270 mm Depth 370 mm Height 400 mm |
Thermal evaporator |
up to 4 materials |
Organic evaporator |
up to 4 materials |
E-beam evaporation |
multi-pocket or single pocket |
Sputtering |
up or down, 2 x 2" |
Co-Deposition |
evaporation and/or sputtering |
Load lock compatible |
optional |
Vacuum level |
mid 10-7 mbar |
Cleanroom compatible |
yes |
UNIVEX G 350
UNIVEX G 350
The UNIVEX G 350 combines a compact design with plenty of chamber space.
For many coating tasks the UNIVEX G 350 offers optimum space conditions and convenient access to process components and substrate processing.
Substrates, respectively substrate holders up to an overall diameter of approximately 300 mm can be processed.
G 350 |
|
|---|---|
chamber size |
Width: 370 mm Depth: 390 mm Height: 500 mm |
thermal evaporator |
up to 8 materials |
organic evaporator |
Up to 4 materials |
e-beam evaporation |
Multi-pocket and/or single pocket |
sputtering |
Up or down: 3 X 2” guns, or 2 X 3” guns |
Co-Deposition |
Evaporation and/or sputtering |
load lock compatible |
optional |
Ion assisted deposition |
optional |
vacuum level |
mid 10-7 mbar |
cleanroom compatible |
yes |
UNIVEX G 450
UNIVEX G 450
Owing to its chamber dimensions, the UNIVEX G 450 is suited for all coating tasks requiring much space. Substrates, respectively substrate holders up to an overall diameter of over 400 mm can be processed. With a height of 650 mm, the vacuum chamber is also suited for lift-off applications.
G 450 |
|
|---|---|
chamber size |
Width: 500 mm Depth: 500 mm Height: 650 mm |
thermal evaporator |
Up to 8 materials |
organic evaporator |
Up to 8 materials |
e-beam evaporation |
Multi-pocket and/or single pocket |
sputtering |
Up or down: 3 X 3”, 2 X 4”, 4 X 2” or other |
Co-Deposition |
Evaporation and/or sputtering |
load lock compatible |
optional |
Ion assisted deposition |
optional |
vacuum level |
mid 10-7 mbar |
cleanroom compatible |
yes |
UNIVEX G 250
The UNIVEX G 250 is a convenient and cost-effective solution for coating tasks requiring not much space.
Substrates, respectively substrate holders up to an overall diameter of approximately 220 mm can be processed.
G 250 |
|
|---|---|
Chamber size |
Width 270 mm Depth 370 mm Height 400 mm |
Thermal evaporator |
up to 4 materials |
Organic evaporator |
up to 4 materials |
E-beam evaporation |
multi-pocket or single pocket |
Sputtering |
up or down, 2 x 2" |
Co-Deposition |
evaporation and/or sputtering |
Load lock compatible |
optional |
Vacuum level |
mid 10-7 mbar |
Cleanroom compatible |
yes |
UNIVEX G 350
The UNIVEX G 350 combines a compact design with plenty of chamber space.
For many coating tasks the UNIVEX G 350 offers optimum space conditions and convenient access to process components and substrate processing.
Substrates, respectively substrate holders up to an overall diameter of approximately 300 mm can be processed.
G 350 |
|
|---|---|
chamber size |
Width: 370 mm Depth: 390 mm Height: 500 mm |
thermal evaporator |
up to 8 materials |
organic evaporator |
Up to 4 materials |
e-beam evaporation |
Multi-pocket and/or single pocket |
sputtering |
Up or down: 3 X 2” guns, or 2 X 3” guns |
Co-Deposition |
Evaporation and/or sputtering |
load lock compatible |
optional |
Ion assisted deposition |
optional |
vacuum level |
mid 10-7 mbar |
cleanroom compatible |
yes |
UNIVEX G 450
Owing to its chamber dimensions, the UNIVEX G 450 is suited for all coating tasks requiring much space. Substrates, respectively substrate holders up to an overall diameter of over 400 mm can be processed. With a height of 650 mm, the vacuum chamber is also suited for lift-off applications.
G 450 |
|
|---|---|
chamber size |
Width: 500 mm Depth: 500 mm Height: 650 mm |
thermal evaporator |
Up to 8 materials |
organic evaporator |
Up to 8 materials |
e-beam evaporation |
Multi-pocket and/or single pocket |
sputtering |
Up or down: 3 X 3”, 2 X 4”, 4 X 2” or other |
Co-Deposition |
Evaporation and/or sputtering |
load lock compatible |
optional |
Ion assisted deposition |
optional |
vacuum level |
mid 10-7 mbar |
cleanroom compatible |
yes |
