Our compact box coating systems allow direct access to the process chamber. Leybold UNIVEX box coating systems are defined by their chamber size.
Modular system design
Multi-purpose vacuum chamber
Convenient access to all installed equipment
Multiple deposition techniques in same chamber
Cleanroom compatible
Our compact box coating systems allow direct access to the process chamber. Leybold UNIVEX Box coating systems are defined by their chamber size.
Owing to its low height of only approximately 1.2 meters it is ideally placed on a benchtop. Substrates up to a max. overall diameter of 220 mm can be coated.
The system controller allows you to run manual, respectively semi-automatic coating processes.
Common applications:
Typical configurations
UNIVEX 250 |
|
---|---|
Chamber size |
width: 270 mm, depth: 370 mm, height: 400 mm |
Thermal evaporator |
up to 4 materials |
Organic evaporator |
up to 4 materials |
E-beam evaporation |
multi-pocket or single pocket |
Sputtering |
up or down, 2 x 2" |
Co-Deposition |
evaporation and/or sputtering |
Load lock compatible |
optional |
Water tempered chamber |
optional |
Vacuum level |
mid 10-7 mbar |
Cleanroom compatible |
yes |
The UNIVEX 400 is a compact coating system for laboratory tasks, respectively pilot production runs. Due to its chamber dimensions, it is ideal for coating of small to medium sized substrates.
Substrates / substrate holders up to an overall diameter of max. 350 mm can be coated.
The system controller allows you to run manual, semiautomatic and fully automatic coating processes.
Common applications
Typical configurations
UNIVEX 400 |
|
---|---|
Chamber size |
width: 420 mm, depth: 480 mm, height: 550 mm |
Thermal evaporator |
up to 8 materials |
Organic evaporator |
up to 8 materials |
E-beam evaporation |
multi-pocket or single pocket |
Sputtering |
up or down, 4 X 2”, 3 X 3”, 2 X 4” or other |
Co-Deposition |
evaporation and/or sputtering |
Load lock compatible |
optional |
Ion assisted deposition |
optional |
Water tempered chamber |
yes |
Vacuum level |
mid 10-7 mbar |
UHV Version |
optional |
Cleanroom compatible |
yes |
The UNIVEX 600 is a compact coating system for the laboratory, respectively pilot production runs. Because of its chamber size it is suited for medium to large substrate sizes.
The attainable substrate throughput meets the general requirements for small series production runs. Substrates / substrate holders up to a max. overall diameter of 550 mm can be coated.
The system controller allows you to run manual, semi-automatic and fully automated coating processes.
Common applications
Typical configurations
UNIVEX 600 |
|
---|---|
Chamber size |
Width: 600 mm Depth: 600 mm Height: 800 mm or 550 mm (sputter) |
Thermal evaporator |
up to 8 materials |
Organic evaporator |
up to 8 materials |
E-beam evaporation |
multi-pocket and/or single pocket, multiple gun operation |
Sputtering |
up or down: 4 X 3”, 3 X 4”, 6 X 2” or other |
Co-Deposition |
evaporation and/or sputtering |
Load lock compatible |
optional |
Ion assisted deposition |
optional |
Water tempered chamber |
yes |
Vacuum level |
mid 10-7 mbar |
UHV Version |
optional |
Cleanroom compatible |
yes |
The UNIVEX 900 is the most sophisticated solution for medium to large substrate sizes, respectively for higher substrate throughputs. Substrates / substrate holders up to an overall diameter of 800 mm can be coated. The system controller allows you to run manual, semi-automatic and fully automated coating processes.
Common applications
Typical configurations
UNIVEX 900 |
|
---|---|
Chamber size |
Width: 900 mm Depth: 900 mm Height: 1100 mm |
Thermal evaporator |
up to 8 materials |
Organic evaporator |
up to 8 materials |
E-beam evaporation |
multi-pocket and/or single pocket, multiple gun operation |
Sputtering |
optional |
Co-Deposition |
yes |
Load lock compatible |
optional |
Ion assisted deposition |
optional |
Water tempered chamber |
yes |
Vacuum level |
mid 10-7 mbar |
UHV Version |
optional |
Cleanroom compatible |
yes |