UNIVEX box coating systems

Our compact box coating systems allow direct access to the process chamber. Leybold UNIVEX box coating systems are defined by their chamber size.

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Modular system design

Multi-purpose vacuum chamber

Convenient access to all installed equipment

Multiple deposition techniques in same chamber

Cleanroom compatible

UNIVEX 250
UNIVEX 400
UNIVEX 600
UNIVEX 900

UNIVEX 250

Our compact box coating systems allow direct access to the process chamber. Leybold UNIVEX Box coating systems are defined by their chamber size.

Owing to its low height of only approximately 1.2 meters it is ideally placed on a benchtop. Substrates up to a max. overall diameter of 220 mm can be coated.

The system controller allows you to run manual, respectively semi-automatic coating processes.

Common applications:

Contact metallization (evaporation of gold, silver, chromium, nickel, titanium, etc.)
Contrast imaging for microscopy (indium, carbon, etc.)
Thin film solar

Typical configurations

Multi-pocket e-beam with thermal evaporator
Up to two 2” sputter guns in confocal configuration for sputter up

	UNIVEX 250
Chamber size	width: 270 mm, depth: 370 mm, height: 400 mm
Thermal evaporator	up to 4 materials
Organic evaporator	up to 4 materials
E-beam evaporation	multi-pocket or single pocket
Sputtering	up or down, 2 x 2"
Co-Deposition	evaporation and/or sputtering
Load lock compatible	optional
Water tempered chamber	optional
Vacuum level	mid 10^-7 mbar
Cleanroom compatible	yes

UNIVEX 400

The UNIVEX 400 is a compact coating system for laboratory tasks, respectively pilot production runs. Due to its chamber dimensions, it is ideal for coating of small to medium sized substrates.

Substrates / substrate holders up to an overall diameter of max. 350 mm can be coated.

The system controller allows you to run manual, semiautomatic and fully automatic coating processes.

Common applications

Thin film solar: CdTe, CIGS, CZTS sputtered processes
Organic electronics (PV, OLEDS)
Optical coatings
Microelectronics

Typical configurations

Multi-pocket e-beam with thermal evaporator and ion source.
Up to four 2” sputter guns in confocal configuration for sputter up or down
E-beam and organics evaporators for inorganic-organic perovskite formation

	UNIVEX 400
Chamber size	width: 420 mm, depth: 480 mm, height: 550 mm
Thermal evaporator	up to 8 materials
Organic evaporator	up to 8 materials
E-beam evaporation	multi-pocket or single pocket
Sputtering	up or down, 4 X 2”, 3 X 3”, 2 X 4” or other
Co-Deposition	evaporation and/or sputtering
Load lock compatible	optional
Ion assisted deposition	optional
Water tempered chamber	yes
Vacuum level	mid 10^-7 mbar
UHV Version	optional
Cleanroom compatible	yes

UNIVEX 600

The UNIVEX 600 is a compact coating system for the laboratory, respectively pilot production runs. Because of its chamber size it is suited for medium to large substrate sizes.

The attainable substrate throughput meets the general requirements for small series production runs. Substrates / substrate holders up to a max. overall diameter of 550 mm can be coated.

The system controller allows you to run manual, semi-automatic and fully automated coating processes.

Common applications

Optical coatings
Opto-electronic devices
Resistive RAM
High-temperature superconductors

Typical configurations

Substrate heaters and/or coolers
Multi-pocket e-beam with thermal evaporator and ion source.
Palette, domed or planetary substrate configurations for single or multiple samples
Multiple-sputter guns in confocal or face-to-face configuration

	UNIVEX 600
Chamber size	Width: 600 mm Depth: 600 mm Height: 800 mm or 550 mm (sputter)
Thermal evaporator	up to 8 materials
Organic evaporator	up to 8 materials
E-beam evaporation	multi-pocket and/or single pocket, multiple gun operation
Sputtering	up or down: 4 X 3”, 3 X 4”, 6 X 2” or other
Co-Deposition	evaporation and/or sputtering
Load lock compatible	optional
Ion assisted deposition	optional
Water tempered chamber	yes
Vacuum level	mid 10^-7mbar
UHV Version	optional
Cleanroom compatible	yes

UNIVEX 900

The UNIVEX 900 is the most sophisticated solution for medium to large substrate sizes, respectively for higher substrate throughputs. Substrates / substrate holders up to an overall diameter of 800 mm can be coated. The system controller allows you to run manual, semi-automatic and fully automated coating processes.

Common applications

Optical coatings
Opto-electronic devices
Resistive RAM
High-temperature superconductors

Typical configurations

Substrate heaters and/or coolers
Multi-pocket e-beam with ion-sources for substrate pre-clean and ion-assisted deposition
Palette, domed or planetary substrate configurations for single or multiple samples
Multiple-sputter guns in confocal or face-to-face configuration

	UNIVEX 900
Chamber size	Width: 900 mm Depth: 900 mm Height: 1100 mm
Thermal evaporator	up to 8 materials
Organic evaporator	up to 8 materials
E-beam evaporation	multi-pocket and/or single pocket, multiple gun operation
Sputtering	optional
Co-Deposition	yes
Load lock compatible	optional
Ion assisted deposition	optional
Water tempered chamber	yes
Vacuum level	mid 10^-7 mbar
UHV Version	optional
Cleanroom compatible	yes