Advantages of cryo pumps in coating and semiconductor processes
September 17, 2020
3 MIN READ
The next diagram shows how the pump condenses gases depending on their freezing point:
There are two distinct temperatures, which are achieved by compressing high purity Helium-4. The first stage traps water vapor, and offers an extremely good pumping speed, producing high quality films. The pump-down time of a high vacuum system is very dependent on the degassing of absorbed water molecules, so this high pumping phase will reduce this crucial time demand.
The time between regenerations is obviously influenced by gas load, but is typically 7-10 days, depending on the process pressure.
Related: Take a closer look at Leybold's range of cryo pumps in our blog post, Cryogenic Pumping with COOLVAC: A Short Introduction.