Calibration systems
Vacuum gauge calibration systems
Process reliability requires checks, adjustments and recalibration of vacuum gauges and sensors at regular intervals.
Setting devices to an initial value is an important component of quality assurance. Calibrated gauges are particularly used where high requirements are made on reproducibility and compatibility as well as on the quality of testing processes. Also, if a clear reference is required for lots of existing pressure measurement devices, calibration is a must.
The CS calibration systems enable you to check and calibrate your vacuum gauges to the defined and required measurement accuracy. This can follow the standards of the German Accreditation Body (DAkkS) or any international standard, whereas the required measurement accuracy must be defined by the users.
In this context the term “Calibration” signifies the comparison of measured values taken from the gauge to be calibrated and a so-called “reference gauge or transfer standard”. As a condition, both gauges must be connected to the same vacuum chamber that is designed in line with ISO 3567 regulations. The reference gauge itself (along with the pressure display and connecting cable) must be calibrated against a traceable transfer standard, at least once a year.
Our reference gauges will be certified by comparing against a PTB1) transfer standard by the DAkkS2) calibration service of the Leybold GmbH.
1) PTB - Physikalisch-Technische Bundesanstalt, Berlin (Federal Institute for physics and technology)
2) DAkkS - Deutsche Akkreditierungsstelle (German calibration service)
We have been calibrating all makes of gauges and sensors independently for customers since 1981.
A DAkkS or factory calibration certificate is issued for the calibration process. Devices with inadequate long-term stability or for measurement principles which are unsuitable for calibration cannot be calibrated.
Calibration can be conducted in static or dynamic mode.
- Static means the calibration chamber is isolated from the pump system and gas is admitted until the desired pressure value is reached. This method requires a low outgassing rate, which is achieved by a clean calibration chamber and an extensive pumping time.
- Using dynamic calibration, the chamber pressure is adjusted by means of a gas dosing valve and a throttling valve on the turbo-molecular pump intake. The inlet gas quantity is manually balanced with the pumped gas flow to set a stable pressure.
CS 3
Leybold is offering a standardized calibration system platform which is based on our proven TURBOLAB high vacuum pump stations. Various configurations, whether table-top or cart-based design, with different pump sets and flexible instrumentation, allowing our customers to calibrate their gauges themselves. Depending on the chosen set-up the calibration range can vary from 1000 mbar to 1 x 10-4 mbar (Torr). Hereby, the calibration accuracy can be adjusted by the number and type of reference gauges.
Advantages:
- Vacuum gauges and measurement systems of any make may be calibrated
- Designed in accordance with DIN 28 418 resp. ISO/DIS 3567
- Transfer standards with PTB-, DAkkS- or factory certificate
- Easier DIN/ISO 9000 approval
- Reliable and reproducible measurements
- Quick start-up
- Measurement system free of hydrocarbons through the utilization of dry compressing vacuum pumps
- Simple operation
- CE approval
Whether CS3 Standard or CS3 Advanced, the base unit of the CS3 is comprising a stainless-steel calibration chamber (design in accordance with DIN 28 418 respectively ISO/DIS 3567/68), supplied with three calibration ports, a dry-compressing Turbo-molecular pump system TURBOLAB 90 and a manual gas inlet system consisting of a dosing valve and a high-vacuum butterfly valve for throttling the suction speed, respectively for isolating the pump system. A full range high vacuum gauge is fitted to display the complete pressure range including the system’s ultimate pressure. As per ISO 3567 this ultimate pressure must be at least 10% of the minimum calibration pressure. In addition to the CS3 Standard scope, the CS3 Advanced is mounted on a mobile cart and comes with a TMP bypass line for dynamic calibration across the full calibration range.
For gauge comparison, the CS 3 comes with two or three reference pressure transmitters CERAVAC CTR 100, a display device GRAPHIX THREE, and the corresponding connection cables. All together they are calibrated at our own calibration lab, in line with the latest DAkkS-regulations
Available options:
- Extended calibration range down to 1 x 10-4 mbar
- Improved accuracy by using CTR 101 instead of CTR 100 reference gauges
CS 7
- Optimized to the required calibration range
- Vacuum gauges and measurement systems of any make may be calibrated
- Designed in accordance with DIN 28 418 resp. ISO/DIS 3567
- Transfer standards with PTB-, DAkkS- or factory certificate
- Easier DIN/ISO 9000 approval
- Reliable and reproducible measurements
- Quick start-up
- Measurement system free of hydrocarbons through the utilization of dry compressing vacuum pumps
- Simple operation
- CE approval
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