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UNIVEX Coating Systems


Cluster & Custom Deposition Systems

For special applications we can also supply cluster or custom systems based on the UNIVEX modular concept.

Customized system design

Programmable, recipe-controlled process sequence

Excellent process vacuum, low residual gas contaminates


Our UNIVEX clusters are equipped according to customer requirements and incorporate separate processing, load lock and transfer chambers. Generally, each vacuum chamber will have its own high vacuum system. The load lock chamber is in the simplest case loaded manually with individual substrates. In addition, magazine processing of several substrates per batch is possible. 

For transporting the substrates between the individual vacuum chambers, commonly motor driven robot arms or linear transfer drive units are used. The UNIVEX control software is customised according to the specific application requirements, and will generally allow fully automatic running of the process including recipe processing. 

UNIVEX Coating Systems


In case no UNIVEX type of system fits to your requirements, any different chamber size or height is desired? Never mind, just contact us.

We are looking forward to making your system possible!

UNIVEX Coating Systems

Read how UNIVEX C 900 supports complex coating solution

Leybold supports the ZSW in complex coating solutions for novel solar cells.

PDF    1.1 MB

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