Ultra-high Vacuum Applications

UHV conditions: a prerequisite for most complex research at government labs, academia and the private industry.

National laboratories, large universities and industries all utilize a wide range of vacuum equipment to achieve required levels of vacuum.

Many of these organizations rely on us for highly-specific vacuum pumps, instruments, and systems.

UHV is the vacuum regime characterised by pressures lower than about 10⁻⁹ mbar (or 10^-7 Pa). Ultra-high vacuum conditions are necessary to reduce surface contamination in many surface analytic techniques. For example X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), secondary ion mass spectrometry (SIMS) or field emission microscopy (FEM).

Thin film growth and preparation techniques with stringent requirements for purity, such as molecular beam epitaxy (MBE) and atomic layer deposition (ALD), also rely on UHV conditions.

In research applications like particle accelerators or gravitational wave detectors ultra-high vacuum conditions will mainly help to reduce beam-gas interactions and limit undesired perturbations from the outer environment. These vacuum levels demand the use of special materials and pumping principles.

We offer a broad range of advanced vacuum solutions for use in ambitious UHV applications. Our components, system solutions and after sales services have shown their benefits in major research centers worldwide.

M-UHV Platforms

Modular Ultra-High Vacuum experimentation platforms

Automation based options include

100 | 200 | 300 | 400

Ultimate Pressure

< 5 x 10^-10 mbar

Substrate temperature variation from 100K - 1000K
Accurate temperature measurement
Modular concept along with UHV transfer station facilities easy assembly of cluster systems
Plug and play configuration for a wide range of UHV experimentation tools
Incorporate flag-style sample holders

Our advantages

Multi-Stage Roots Pumps

Ideal backing pump for UHV
Low ultimate pressure
Very quiet <52db(A), low vibrations
No contamination with oil or particles
Maintenance free for many years

Scroll Pumps

Oil free
Quiet 55db(A)
10 min customer tip seal change
Very low ultimate pressure

Turbomolecular Pumps (TMP)

Full range of turbomolecular pumps and systems
Hydrocarbon free vacuum generation
Low ultimate pressure
High pumping speed for light gasses
Low maintenance requirements
Plug and play pump systems

Cryo Pumps

COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands
Clean and dry vacuum generation
COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen

Ion Getter Pumps & Controllers

Hydrocarbon free operation into the XHV range
No moving parts, no operating noise
Absolutely free of vibrations
High tolerance against temperature, radiation and magnetic fields

Titanium Sublimation Pumps

Ideal to remove residual gasses in UHV systems
Very high pumping speed for reactive gasses
Simple and cost effective

NEG Pumps

High trapping efficiency for H2 (main residual gas in UHV/ XHV)
Vibration free operation
Oil free

UHV Hardware, Valves, Fittings

Broad range of UHV valves, hardware and fittings with CF flanges
Low gas resorption materials with lowest leak rates
High baking temperatures

Ideal backing pump for UHV
Low ultimate pressure
Very quiet <52db(A), low vibrations
No contamination with oil or particles
Maintenance free for many years

Oil free
Quiet 55db(A)
10 min customer tip seal change
Very low ultimate pressure

Full range of turbomolecular pumps and systems
Hydrocarbon free vacuum generation
Low ultimate pressure
High pumping speed for light gasses
Low maintenance requirements
Plug and play pump systems

COOLVAC cryo pumps with high water vapor pumping capability and low maintenance demands
Clean and dry vacuum generation
COOLPOWER cold heads for cryogenic temperature generation without need for liquid helium and liquid nitrogen