DIJ

Oil diffusion pumps

High vacuum pumps with high gas-throughput and pumping speed

Leybold DIJ series of oil diffusion pumps are high vacuum pumps (<10^-2 mbar) featuring an advanced design with innovative heater system, special body construction, and a five-stage nozzle system for faster pump down of the process chamber, reduced energy consumption and a lower carbon footprint.

The DIJ series provide an improved gas throughput and stable high vacuum pressure in the range of < 10^-2 mbar. The pumping speed ranges from 3,000 l/s to 33,000 l/s in an operating range of < 5 x 10^-1 to 10^-7 mbar.

The DIJ features an advanced new heating concept, a powerful five-stage nozzle system, variable flange connections, a multitude of electrical connection options including the Energy Efficiency Controller (EEC), fully equipped with fore-line baffles and cold cap baffles. The DIJ five-stage system design provides excellent performance. Four diffusion pump stages for the high pumping speed and one ejector stage for high gas throughput at pressures of <10^-2 mbar and a high fore-vacuum stability. The variants with EEC offer added energy efficiency resulting in further energy savings and a lower carbon footprint.

Leybold DIJ oil diffusion pumps require little maintenance - no wear caused by revolving parts - easy to operate. The DIJ series is impressive with its innovative and highly energy-efficient construction.

User advantages

Five-stage nozzle system

Cold cap baffle and fore vacuum baffle

Innovative heating concept

Different flanges (ANSI/ISO)

Various electrical connection opportunities to meet customers requirements

Energy Efficiency Control

Key Facts

Pumping speed 3.000 to 33.000 l/s

Operating range < 10^-1 to 10^-7 mbar

Optimal pumping speed in a pressure range of < 10^-3 mbar

The DIJ line offers

Stable high vacuum
High pumping speed
High gas-throughput
Safe and economical design
CE-compliant electronics
Easy to operate
Maintenance-friendly design for quick and easy replacement of heating elements
Wide range of accessories available
Flexible electrical wiring for worldwide use
Innovative energy efficiency control (EEC)

DIJ benefits at a glance

The DIJ line offers a wide range of beneficial features for an optimal integration in your applications.

Innovative heating concept
Five-stage nozzle system
Different flanges (ANSI/ISO)
Cold cap baffle
Energy Efficiency Control (EEC)

Innovative heating concept

Unique, innovative heating concept that utilizes advanced heater cartridges with large heat exchange surface for an optimized energy transfer into the oil. Effective temperature monitoring protects the system against overheating. The insulated heater area ensures minimum energy losses.

Minimum stress and long lifetime for heaters and oil
Fast heat-up time
Flanged heaters, easy to exchange

Five-stage nozzle system

The DIJ pumps are equipped with a new five-stage nozzle system. Four pump stages guarantee high pumping speed at low pressures and lead to a low range of high vacuum. The ejector stage leads to a high fore-vacuum stability and optimized gas-throughput.

High gas-throughput and pumping speed
Integrated cold cap baffle for minimal oil-backstreaming

Different flanges (ANSI/ISO)

Choice of flange variants for improved connectivity

ANSI / Inch flanges (O-ring sealed)
ISO-F or ISO-K flanges (centering O-ring sealed)

Cold cap baffle and fore vacuum baffle

To prevent fluid from flowing back into the vacuum chamber, the DIJ series pumps are fitted with our process-proven cold cap baffle and an optimized fore-vacuum baffle.

Innovative, new foreline baffle for reduced oil losses
Better process parameters
Reduced oil back streaming

Energy Efficiency Control

Energy savings up to 30% without loss of pump performance

Oil diffusion pumps require a certain minimum oil temperature for operation. Without a controller, 100% of the installed heating power is constantly utilized to heat the oil. Leybold’s innovative energy efficiency controller for diffusion pumps cuts power consumption by up to 30% as the supplied power is significantly reduced after the pump has attained its operating temperature. Further savings result from the utilization of the standby mode at a reduced temperature.

Improved energy efficiency
Increased uptime of the oil and the heating cartridges
Excellent operating convenience and simple to use
Simple, visual monitoring of the parameters
USB Interface and Ethernet connectivity

Technical Information
Documents
Applications
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		DIJ 10	DIJ 320	DIJ 16	DIJ 500	DIJ 20	DIJ 630	DIJ 32	DIJ 800	DIJ 35	DIJ 1000
High vacuum		10'' ANSI	320 ISO-K	16'' ANSI	500 ISO-K	20'' ANSI	630 ISO-K	32'' ANSI	800 ISO-F	35'' ANSI	1000 ISO-F
fore vacuum connection		2'' ANSI	63 ISO-K	3'' ANSI	100 ISO-K	4'' ANSI	160 ISO-K	6'' ANSI	200 ISO-K	6'' ANSI	200 ISO-K
Pumping speed for
Air < 8 x 10-4mbar	l/s	3000		6800		10800		21000		33000
Argon < 1 x 10-4 mbar	l/s	2750		6350		9500		18000		26000
Operating range	mbar	< 10-1 - 10-7		< 10-1 - 10-7		< 10-1 - 10-7		< 10-1 - 10-6		< 10-1 - 10-6
Ultimate total pressure	mbar	< 5 · 10-7		< 5 · 10-7		< 5 · 10-7		< 1 · 10-6		< 1 · 10-6
Mains voltage		3 ~ 400V /N/PE		3 ~ 400V /N/PE		3 ~ 400V /N/PE		3 ~ 400V /N/PE		3 ~ 400V /N/PE
depending on variant, 50/60Hz		3 ~ 460V /N/PE		3 ~ 460V /N/PE		3 ~ 460V /N/PE		3 ~ 460V /N/PE		3 ~ 460V /N/PE
Heating power	kW	3,6		7,2		10,8		21,5		21,5
Weight, approx.	kg	95		152		230		570		610