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Turbomolecular vacuum pumps

For applications requiring a clean high or ultra-high vacuum

Mechanical, hybrid and magnetic levitated high vacuum pumps

Turbomolecular vacuum pumps are used in applications requiring a clean high or ultra-high vacuum for example in research & development of nuclear fusion, or in industrial fields like the coating industry and in analytical instrumentation.  

In principle, the turbomolecular pump is a turbine rapidly rotating in a housing where the stages of the turbine are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction.  

By means of a momentum transfer from the rotating rotor blades to the gas molecules, the gas molecules initially non directional thermal motion is changed into a directional motion from the inlet flange of the pump in the axial direction towards the fore vacuum flange.  

In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)) the mean free path of the gas molecules is larger than the spacing between the rotor and the stator blades (typically a few tenths of a millimetre). Correspondingly the molecules chiefly collide with the optically dense rotor blades, resulting in a highly efficient pumping action. In the laminar (constant) flow range (i.e. at pressures over 10-1 mbar (0.75 x 10-1 Torr)) the effect of the rotor is impaired by frequent collisions between molecules themselves.  

For this reason, a turbomolecular pump is not capable of pumping gases at atmospheric pressure. 

TURBOVAC MAGiNTEGRA: Magnetically levitated turbomolecular pumps

Compact pumps, perfectly suited for use in challenging industrial applications such as coating applications as well as analytics and research. 

MAGiNTEGRA pumps are flexible, cost and maintenance efficient with a high resistance and performance.

TURBOVAC i: Hybrid Turbomolecular Pumps

Highly versatile pumps suited for a wide range of applications in R&D, analytical, life sciences and industrial & coating sectors.

Great pumping performance, integrated drive electronics for easy integration. Available in 8 sizes with variants and accessories to meet the requirements of your process.

We also offer several variants such as:

  • TURBOVAC iX acts as your controller in your vacuum system.
  • TURBOVAC iR to fulfil the requirements of applications where high ionizing radiation is surrounding
  • TURBOVAC i Multi Inlet: for applications that require a multi-point vacuum performance

Looking for customized products?

Our Customer Focus Engineering (CFE) team is dedicated to delivering to your specification and will manage all aspects of the process from requirements gathering to prototyping products. They will also ensure availability of volume pump supply when you need it.

The CFE team is committed to making your cooperation with us simple and fast. They will work out high quality solutions to meet your requirements.