Cluster coating systems aimed at production applications and offering high quality, coherent and very uniform films. Applications include solar panels, glass coating, superconductors, optoelectronics, and OLED display.
The concept is to offer bespoke tools based on a cluster principal, with coating chambers accessed via a loadlock and with the ability to transport substrates between the dedicated chambers. The components are placed at atmospheric pressure into a loadlock, which is then pumped down, allowing the material to be transferred into a process chamber without the need to evacuate the chamber. This means faster process times whilst maintaining the integrity of the film. Moreover, for sequential film deposition steps, the substrate is moved from chamber to chamber under vacuum, again reducing process times and avoiding possible film degradation.