USUnited States

Thin Films

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. The thin film technology has been improved in the last decades and requires reliable products to reach best quality. For the thin film deposition processes, Leybold can provide the right vacuum equipment fullfilling the requirements of this application with its performant dry DRYVAC / RUVAC pumping systems.

Advantages of the DRYVAC / RUVAC Systems for thin film deposition

Pump systems with dry compressing pumps

High hydrogen pumping speed
Particle resistant
High media compatibility for typical process gases
Integrated monitoring of operating parameters and roots pump control
Adjustable temperature and purge gas flow
Parameter controllable via Profi bus

Related products
Your request

Do you have any questions?

First name

Surname

Company

Phone (optional)

Street

ZIP

City

Country

Message

Subscribe me to the Leybold Vacuum Newsletter to get important and interesting information on products or special actions.

Leybold is committed to protecting and respecting your privacy, and we will only use your personal information to administer your account and to provide the products and services you requested from us. From time to time, we would like to contact you about our products and services, as well as other content that may be of interest to you. If you consent to us contacting you for this purpose, please tick below to say how you would like us to contact you:
I agree to receive marketing information from Leybold.
You can unsubscribe from these communications at any time. For more information on how to unsubscribe, our privacy practices, and how we are committed to protecting and respecting your privacy, please review our Privacy Policy.
By clicking submit below, you consent to allow Leybold to store and process the personal information submitted above to provide you the content requested.