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Thin Films

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. The thin film technology has been improved in the last decades and requires reliable products to reach best quality. For the thin film deposition processes, Leybold can provide best in class vacuum equipment fullfilling the requirements of this application with its performant dry DRYVAC / RUVAC pumping systems.

Advantages of the DRYVAC / RUVAC Systems for thin film deposition

Pump systems with dry compressing pumps

High hydrogen pumping speed
Particle resistant
High media compatibility for typical process gases
Integrated monitoring of operating parameters and roots pump control
Adjustable temperature and purge gas flow
Parameter controllable via Profi bus

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