UNIVEX G glove box

Loading and coating of moisture and oxygen sensitive substrates under an inert environment

Our standard glovebox system enables loading and coating of moisture and oxygen sensitive substrates under the inert environment of a glovebox.

The UNIVEX G systems have a front sliding door for connection to the glovebox. This sliding door allows the operator an easy access to the process chamber via the glovebox. In case direct access is required, the UNIVEX G have a second door at the rear.

Common applications

Contact metallization (evaporation of gold, silver, chromium, nickel, titanium, etc.)
Biosensors / medical devices
Organic electronics: OLED, organic photovoltaics
Quantum dots / display
E-beam and organics evaporators for inorganic-organic perovskite formation

Direct and easy access to process equipment via front side sliding door

Convenient service access via back side hinged door

Integration of any process components

UNIVEX G 250
UNIVEX G 350
UNIVEX G 450

UNIVEX G 250

The UNIVEX G 250 is a convenient and cost-effective solution for coating tasks requiring not much space.

Substrates, respectively substrate holders up to an overall diameter of approximately 220 mm can be processed.

	G 250
Chamber size	Width 270 mm Depth 370 mm Height 400 mm
Thermal evaporator	up to 4 materials
Organic evaporator	up to 4 materials
E-beam evaporation	multi-pocket or single pocket
Sputtering	up or down, 2 x 2"
Co-Deposition	evaporation and/or sputtering
Load lock compatible	optional
Vacuum level	mid 10^-7 mbar
Cleanroom compatible	yes

UNIVEX G 350

The UNIVEX G 350 combines a compact design with plenty of chamber space.

For many coating tasks the UNIVEX G 350 offers optimum space conditions and convenient access to process components and substrate processing.

Substrates, respectively substrate holders up to an overall diameter of approximately 300 mm can be processed.

	G 350
chamber size	Width: 370 mm Depth: 390 mm Height: 500 mm
thermal evaporator	up to 8 materials
organic evaporator	Up to 4 materials
e-beam evaporation	Multi-pocket and/or single pocket
sputtering	Up or down: 3 X 2” guns, or 2 X 3” guns
Co-Deposition	Evaporation and/or sputtering
load lock compatible	optional
Ion assisted deposition	optional
vacuum level	mid 10^-7 mbar
cleanroom compatible	yes

UNIVEX G 450

Owing to its chamber dimensions, the UNIVEX G 450 is suited for all coating tasks requiring much space. Substrates, respectively substrate holders up to an overall diameter of over 400 mm can be processed. With a height of 650 mm, the vacuum chamber is also suited for lift-off applications.

	G 450
chamber size	Width: 500 mm Depth: 500 mm Height: 650 mm
thermal evaporator	Up to 8 materials
organic evaporator	Up to 8 materials
e-beam evaporation	Multi-pocket and/or single pocket
sputtering	Up or down: 3 X 3”, 2 X 4”, 4 X 2” or other
Co-Deposition	Evaporation and/or sputtering
load lock compatible	optional
Ion assisted deposition	optional
vacuum level	mid 10^-7 mbar
cleanroom compatible	yes

UNIVEX G 250

The UNIVEX G 250 is a convenient and cost-effective solution for coating tasks requiring not much space.

Substrates, respectively substrate holders up to an overall diameter of approximately 220 mm can be processed.

	G 250
Chamber size	Width 270 mm Depth 370 mm Height 400 mm
Thermal evaporator	up to 4 materials
Organic evaporator	up to 4 materials
E-beam evaporation	multi-pocket or single pocket
Sputtering	up or down, 2 x 2"
Co-Deposition	evaporation and/or sputtering
Load lock compatible	optional
Vacuum level	mid 10^-7 mbar
Cleanroom compatible	yes

UNIVEX G 350

The UNIVEX G 350 combines a compact design with plenty of chamber space.

For many coating tasks the UNIVEX G 350 offers optimum space conditions and convenient access to process components and substrate processing.

Substrates, respectively substrate holders up to an overall diameter of approximately 300 mm can be processed.

	G 350
chamber size	Width: 370 mm Depth: 390 mm Height: 500 mm
thermal evaporator	up to 8 materials
organic evaporator	Up to 4 materials
e-beam evaporation	Multi-pocket and/or single pocket
sputtering	Up or down: 3 X 2” guns, or 2 X 3” guns
Co-Deposition	Evaporation and/or sputtering
load lock compatible	optional
Ion assisted deposition	optional
vacuum level	mid 10^-7 mbar
cleanroom compatible	yes

UNIVEX G 450

	G 450
chamber size	Width: 500 mm Depth: 500 mm Height: 650 mm
thermal evaporator	Up to 8 materials
organic evaporator	Up to 8 materials
e-beam evaporation	Multi-pocket and/or single pocket
sputtering	Up or down: 3 X 3”, 2 X 4”, 4 X 2” or other
Co-Deposition	Evaporation and/or sputtering
load lock compatible	optional
Ion assisted deposition	optional
vacuum level	mid 10^-7 mbar
cleanroom compatible	yes

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UNIVEX G glove box

UNIVEX G 250

UNIVEX G 350

UNIVEX G 450

UNIVEX G 250

UNIVEX G 350

UNIVEX G 450

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