UNIVEX 镀膜系统
UNIVEX 系统系列已在大学和工业科研以及试生产中的实验镀膜和薄膜沉积应用中得到很多应用。
Thin film vacuum coating products
The Leybold UNIVEX coating family varies from:
- Box coating systems
- Glove box systems
- Dactyloscopy systems
- Cluster tools as well as customized solutions
UNIVEX coating products are highly sophisticated systems which cover most of our customer needs thanks to their modular design.
Our UNIVEX systems are equipped with vacuum components made by Leybold. These pump systems are well considered to fit for the respective chamber size and application. Leybold has a wide range of backing pumps, which can be dry or oil-sealed. Any high vacuum pump could be attached e.g. turbomolecular or cryogenic pump.
The main purpose is to provide a reliable vacuum environment for customers' physical vapor deposition (PVD) process of thin film coating. The system's process equipment can consist of evaporation sources (thermal, e-beam, or organic), sputtering sources, a range of substrate treatment (e.g. heating, cooling) and much more.
We customize any of these systems to your specific needs.
