Dry compressing vacuum pumps in combination with roots blowers
- High pumping speed
- High reliability
- Suitable for demanding process applications (dust, vapors, etc.)
- Monitoring system
Turbomolecular pumps
- Suited for handling particles
- High forevacuum tolerance
- Installation in any orientation
Single-stage rotary vane pumps in combination with roots blowers
- Designed for fast pump down of
- Load Lock and Transfer Chambers
- Robust vacuum generator for the rough vacuum range
- High reliability
- Cost optimized