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UNIVEX Coating Systems

UNIVEX G

Glovebox Systems

Our standard glovebox system enables loading and coating of moisture and oxygen sensitive substrates under the inert environment of a glovebox. The UNIVEX G systems have a front sliding door for connection to the glovebox. This sliding door allows the operator an easy access to the process chamber via the glovebox. In case direct access is required, the UNIVEX G have a second door at the rear.

 

Common applications

  • Contact metallization (evaporation of gold, silver, chromium, nickel, titanium, etc.)
  • Biosensors / medical devices
  • Organic electronics: OLED, organic photovoltaics
  • Quantum dots / display
  • E-beam and organics evaporators for inorganic-organic perovskite formation

Direct and easy access to process equipment via front side sliding door

Convenient service access via back side hinged door

Integration of any process components

UNIVEX G 250

The UNIVEX G 250 is a convenient and cost-effective solution for coating tasks requiring not much space. Substrates, respectively substrate holders up to an overall diameter of approximately 220 mm can be processed.

UNIVEX G 250 with electrical cabinet
 

G 250

Chamber size

Width 270 mm   Depth 370 mm Height 400 mm

Thermal evaporator

up to 4 materials

Organic evaporator

up to 4 materials

E-beam evaporation

multi-pocket or single pocket

Sputtering

up or down, 2 x 2"

Co-Deposition

evaporation and/or sputtering

Load lock compatible

optional

Vacuum level

mid 10-7 mbar

Cleanroom compatible

yes

UNIVEX G 350

The UNIVEX G 350 combines a compact design with plenty of chamber space. For many coating tasks the UNIVEX G 350 offers optimum space conditions and convenient access to process components and substrate processing. Substrates, respectively substrate holders up to an overall diameter of approximately 300 mm can be processed.

UNIVEX Coating Systems
 

G 350

chamber size

Width: 370 mm Depth: 390 mm Height: 500 mm

thermal evaporator

up to 8 materials

organic evaporator

Up to 4 materials

e-beam evaporation

Multi-pocket and/or single pocket

sputtering

Up or down: 3 X 2” guns, or 2 X 3” guns

Co-Deposition

Evaporation and/or sputtering

load lock compatible

optional

Ion assisted deposition

optional

vacuum level

mid 10-7 mbar

cleanroom compatible

yes

UNIVEX G 450

Owing to its chamber dimensions, the UNIVEX G 450 is suited for all coating tasks requiring much space. Substrates, respectively substrate holders up to an overall diameter of over 400 mm can be processed. With a height of 650 mm, the vacuum chamber is also suited for lift-off applications.

UNIVEX Coating Systems
 

G 450

chamber size

Width: 500 mm Depth: 500 mm Height: 650 mm

thermal evaporator

Up to 8 materials

organic evaporator

Up to 8 materials

e-beam evaporation

Multi-pocket and/or single pocket

sputtering

Up or down: 3 X 3”, 2 X 4”, 4 X 2” or other

Co-Deposition

Evaporation and/or sputtering

load lock compatible

optional

Ion assisted deposition

optional

vacuum level

mid 10-7 mbar

cleanroom compatible

yes

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