Process reliability is possible with regular checks, adjustments and recalibration of vacuum gauges and sensors which must be calibrated at regular intervals. Setting the devices to an initial value is an important component of quality assurance. Calibrated gauges are particularly used where high requirements are made on reproducibility and compatibility as well as on the quality of testing processes. Also, if a clear reference is required for lots of existing pressure measurement devices, calibration is a must.
The CS calibration systems from Leybold enable customers to check and calibrate the defined and required measurement accuracy of their vacuum gauges themselves. This can follow the standards of the German Accreditation Body (DAkkS) or any international standard, whereas the required measurement accuracy must be defined by the users.
In this context the term “Calibration” signifies the comparison of measured values taken from the gauge to be calibrated and a so-called “reference gauge or transfer standard”. As a condition, both gauges must be connected to the same vacuum chamber that is designed in line with ISO 3567 regulations. The reference gauge itself (along with the pressure display and connecting cable) must be calibrated against a traceable transfer standard, at least once a year.
Our reference gauges will be certified by comparing against a PTB1) transfer standard by the DAkkS2) calibration service of the Leybold GmbH.
1) PTB - Physikalisch-Technische Bundesanstalt, Berlin (Federal Institute for physics and technology)
2 DAkkS - Deutsche Akkreditierungsstelle (German calibration service)
A DAkkS or factory calibration certificate is issued for the calibration process. Devices with inadequate long-term stability or for measurement principles which are unsuitable for calibration cannot be calibrated.
Calibration can be conducted in static or dynamic mode.
The base unit of the CS 3 mainly consists of a stainless-steel calibration chamber (design in accordance with ISO 3567) with three calibration ports and a dry compressing Turbo-molecular pump system TURBOLAB 90. For pressure setting a manual gas dosing valve is used in combination with a butterfly valve for throttling the suction speed. A full range high vacuum gauge is fitted to display the complete pressure range of the sensors to calibrate and the system's ultimate pressure. As per ISO 3567 this ultimate pressure must be at least 10% of the minimum calibration pressure.
For gauge comparison, the CS 3 comes with two or three reference transmitters CERAVAC CTR 100 N (or CTR 101 N for improved accuracy), a display device GRAPHIX THREE and the corresponding connection cables. All together they are calibrated at our own calibration lab, in line with latest DAkkS-regulations.