Residual gas analyzers

LEYSPEC

The LEYSPEC residual gas analyser (RGA) product family enables simple and intuitive operation.

At the push of a button, you can display the partial pressures of key gases and if your process involves an additional gas, you can assign it to the spare display channel.

Due to the high bake-out temperatures achievable, the LEYSPEC is ideal for use in demanding high vacuum and ultra-high vacuum applications.

Working principle

The measurement cell is a hot cathode ionization vacuum gauge. Electrons are emitted from the hot filaments and accelerated toward the source via an electrical bias. The fast-moving electrons collide with the gas molecules, dislodging electrons, thus ionizing them. Positive gas ions provide their current to the negative loaded ion collector. Ion current is proportional to pressure. The more ions, the higher the ion current. The quadrupole array is composed of four stainless steel rods. A direct current and high frequency voltage is applied to all rods. This creates a complex magnetic field. By varying the voltage, the magnetic field is controlled.

The resulting vibration only allows ions of a specific mass to “fly” through it and reach the detection part:

Ions with an appropriate mass to charge ratio (m/e), will oscillate in a stable three-dimensional trajectory through the poles.
Ions of incorrect m/e will oscillate out of control and collide with the poles

The ions arrive in the ion collector and provide an output current which is a measure of the relative abundance of the ions getting through the filter. The ion current or partial pressure against the m/z ratio is then displayed on the unit or in the software.

Based on the described working principle, the LEYSPEC RGA verifies the gas purity by finding and displaying the gas composition. This allows the LEYSPEC to identify gas contaminants and perform further process and equipment control for an overall optimization of process performance and yield.

All-in-one device for simple and intuitive operation

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Due to its high sensitivity the LEYSPEC residual gas analyzer allows detection of very small traces of contaminants or process gases. The product range has solutions for 100, 200 and 300 amu. Bake out temperature of up to 300 °C for operations in harsh environments is possible.

The LEYSPEC can be intuitively operated with its own software and integrated control and display unit. Simple residual gas analysis is possible without connecting it to a computer. Key gases can be displayed at the push of a button and a spare display is available so additional gases can be shown.

They are suitable as well for demanding test procedures and residual gas analysis in high vacuum systems.

With the preinstalled functions of the LEYSPEC, like helium leak testing, warnings and error levels for selectable gasses as well as a degassing function after the start or venting, this residual gas analyzer is a great addition to any system.

LEYSPEC Cart

The mobile residual analyzer system

The LEYSPEC Cart carries a fully integrated differential pumping system for maximum flexibility and easy handling.

It's a completely independent pumping system that is easily adaptable to a wide range of measurement tasks, with rapid operational readiness and operability at various pressures.

Our solutions:

Independent pumping system with SCROLLVAC 7 plus and TURBOVAC 350 i
Integrated process control for quick and easy operation
Easy and intuitive software for LEYSPEC RGA
Completely integrated in an independently movable cart
UHV needle valve for flexible operation at different pressure levels up to atmosphere

Features

Compact and easy

All products come with the integrated display for easy and quick operation as well as the LEYSPEC software for sophisticated test procedures and residual gas analysis. Compact in size and mountable in any orientation, the LEYSPEC product range is perfectly suited for different built-in situations.

Due to the intuitive interface, the LEYSPEC residual gas analyzer is very easy to operate. At the push of a button, you can display the partial pressures of key gases and if your process involves an additional gas, you can assign it to the spare display channel.

Intuitive software

The intelligent and intuitive LEYSPEC software completes the offering. The user friendly interface allows a wide range of use cases, from simple operation to complex analysis. Creating recipes is as easy as it should be: Quick and convenient.

During operation the total pressure is displayed and different views can be chosen to fit the view for the purpose of the analysis. Choose between the scan mode, trend mode or analog mode.

High sensitivity

The LEYSPEC product family offers very high sensitivity for accurate residual gas analysis. This allows detecting even very small traces of contaminants or process gases.

The LEYSPEC verifies the gas purity by finding and displaying the its composition. Thus gas contaminants are identified and further process and equipment control for an overall optimization of process performance and yield are executed.

Flexible

The new LEYSPEC series is the perfect solution for any application in mass spectrometry. Focusing on residual gas analysis the product range offers solutions for 100, 200 or 300 amu – depending on the process requirements.

Advanced features

Preinstalled software functions allow many additional functionalities and test procedures such as a helium leak test or setting of warnings and error levels for selectable gases. A programmable degas function is implemented for simple process degassing after start or exposure to atmosphere. The background suppression allows focussing on the important peaks.

High bake-out

With its high bake-out temperatures of up to 300 °C, the LEYSPEC ultra is perfectly suited for sophisticated high and ultra high vacuum applications. The LEYSPEC ultra range offers very high bake-out temperature so even in harsh environments reliable gas analysis can be performed.

The LEYSPEC RGA offers a very high sensitivity combined with an intuitive software allowing all basic and advanced test procedures